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M-61-F Series Fixed Set Point Flow Switches

Industry: Semiconductor
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The operating principle is based on a free floating magnetic piston which responds only to the motion of fluids within the line, not to static or system pressures. In the presence of fluid flow, controlled movement of the piston actuates an external hermetically sealed reed switch. This switch can be used to actuate audible or visual alarms, as well as relays, or other controls.

The operating principle is based on a free floating magnetic piston which responds only to the motion of fluids within the line, not to static or system pressures. In the presence of fluid flow, controlled movement of the piston actuates an external hermetically sealed reed switch. This switch can be used to actuate audible or visual alarms, as well as relays, or other controls.

Features

• For corrosive and non-corrosive gases or liquids
• Senses increasing or decreasing flow
• Very accurate custom flow settings
• Hermetically sealed
• All-PFA molded body with PTFE piston

  • Sample flow monitoring
  • Alarm actuation
  • Purge flows
  • Loss of flow protection
  • Semiconductor etch tools
  • Laser cooling equipment

       

Products specifications
Body PFA
Wetted Parts PFA
Maximum Operating (psig) 60
Maximum Operating Temperature 40°C
Reed Switch Data (Electrical Ratings) 10 Watts SPST or 3 Watts SPDT (Hermetically Sealed) UL Recognized. File E47258.
Reed Switch Operating Temperature -40ºC to 125ºC
Switching Voltage 200 VDC (170 VDC for SPDT)
Breakdown Voltage 200 VDC (200 VDC for SPDT)
DC Resistive 10 VA (3 VA for SPDT)
AC Resistive 10 Watts (3 VA for SPDT)
Switching Current 0.5 A (0.25 A for SPDT)
Carrying Current 1.2 A (0.5 A for SPDT)
Lead Wires No 24 to 18 AWG. 18" Length, Polymeric UL Recognized (Belden cable or special shielded cable is available)
Lead Wires Color Green - Common, Yellow - Normally Closed, Orange - Normally Open
Flow Calibration (Higher accuracy units available)
Set Point Accuracy 10% maximum
Repeatability ± 2% maximum
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