The CMFC-5000 Integrated and Compact Coriolis Flow Controller controls liquid and Slurry flows up to 5000 grams per minute to within 1.5% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
The CPFM-8800 Series is a family of advanced Coriolis flow meters fabricated exclusively from PFA polymeric material for measuring liquids in high-purity semiconductor, biopharm and other applications that require all-PFA wetted surfaces and provide a Mass Flow Rate, Total Mass and Temperature output with accuracy ±1% of reading.
The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.
The LFC-7650 Series high-performance closed-loop flow controllers for CMP polishing slurries are designed as a drop-in upgrade to improve performance of existing semiconductor manufacturing polishing tools.
The Malema Sensors® M-1500MB Series Inline Ultrasonic Flow Meter consists of a compact flow sensor and remote electronics. The M-1500MB Inline Ultrasonic Flow Meter utilizes the latest digital signal processing (DSP) technology and provides flow measuring solutions with minimum compromise in performance. The M-1500MB Series Inline Ultrasonic Flow Meter is an ideal choice for use in the industries where minimal footprint, high purity and corrosion resistant wetted parts are required.
The Malema M-200-F adjustable flow switch has an all-PFA body. It is ideal for semiconductor manufacturing and high-purity applications, as well as aggressive chemistries.
The M-2111 Series Ultrasonic Flow Meter features non-contact transducers and a PFA flow tube design without dead pockets. Its advanced signal converter with DSP electronics offers unmatched flow measurement capabilities even in tough applications. The M-2111 Ultrasonic Flow Meter is an ideal choice for use in the semiconductor industry where extreme cleanliness and anti-corrosiveness are required.