Products tagged with 'cmp'

The CMFC-5000 Integrated and Compact Coriolis Flow Controller controls liquid and Slurry flows up to 5000 grams per minute to within 1.5% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.

The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.

The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.

The LFC-7650 Series high-performance closed-loop flow controllers for CMP polishing slurries are designed as a drop-in upgrade to improve performance of existing semiconductor manufacturing polishing tools.