The LFC-7000 Series is a line of high-performance closed-loop flow controllers designed for use in a wide variety ofhigh-purity liquids including DI water, harsh chemicals, and CMP polishing slurries.
• High Accuracy - Controls flowrate to within ± 1% of setpoint; ideal for fluid blending and/or dispense applications• Fast Response 3 seconds (typically < 2 seconds for most applications)• Broad application range with 2 types of control valves• Wide range of flow control capability; 5 mL/min - 12000 mL/min (turndown can be as high as 100:1)• All PTFE/PFA wetted part construction – insures compatibility with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)• Low maintenance - modules featuring ultrasonic flowmeters with NO moving parts provide the ultimate in “uptime” (slurry module with pinch tube replacement cycle of 3 years or longer)
Standard Full Scale Range:
50, 100, 250, 500, 1000, 1500, 2500*, 4000, 8000, 12000 mL/min
Accuracy**: (for room temperature DIW)
±1% of set point or ± 3mL/min(whichever is larger)
Repeatibility**:
±1% of set point or ±1 mL/min (whichever is larger)
Control Repeatibility:
±0.5% of set point or ±0.5mL/min(whichever is larger)
Flow Control Time:
< 3 sec
Fluid Temperature:
10 - 60 ºC***
Ambient: Temperature/Humidity:
0 - 40 ºC / 30 - 80% RH, without Dew
Maximum Expected Operating Pressure:
50 psig
Maximum Safe Internal Pressure:
70 psig
Differential Pressure Range:
7 to 30 psid
The enclosure footprint may be larger for these flow ranges to meet the pressure drop specification.The minimum differential pressure requirements can be higher for these ranges. **Please consult with Malema for tighter accuracy/repeatability needs. *** Consult the factory for higher temperature application
Non Wetted Parts, Enclosure:
PPS, PEEK, Acrylic,Vinyl, PVC**
Wetted parts:
PFA, PTFE, Pt cured Silicone*
*Only used in the Slurry Module**Flame retardant (FMET4325)
Mounting Orientation:
Horizontal or Vertical
Fluid Connections:
Inlet/Outlet:1/4” or 3/8”, Flare or Pillar
Flow Restrictions (orifice):
> 2 mm
Ingress Rating:
IP64
Power Supply Input:
24 Vdc ± 10%
Current Consumption:
Max 0.5 A
Alarm Signals:
Max 30 Vdc, 200 mA NPN open collector
ControlSignal In*:
0 to 10 Vdc or 4 to 20 mA
Flow Signal Out*:
0 to 10 Vdc or 4 to 20 mA**
* Other options available** Both Active and Passive current options available
For additional specification details, please refer to the product data sheet located in the documentation tab of this web page.
