MIID-1000 Malema Interconnect Interlock Device By-Pass Leak Detection and Prevention System

Industry: Semiconductor

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Created exclusively for use in Chemical Mechanical Planarization (CMP) tools, the patented Malema Interconnect Interlock Device (MIID-1000) By-Pass Leak Detection and Prevention System, has been designed specifically to protect against liquid back-flow and internal bypass leaks. This capability is created via a manifold of pneumatically actuated valves that operate in a coordinated fashion in order to ensure that CMP-liquid supplies cannot be contaminated before use or during the actual CMP process. MIID-1000 has retrofit kits that can be installed into existing CMP tools.

Overview
Specifications
Documentation

The Malema™ Interconnect Interlock Device (MIID-1000) By-Pass Leak Detection and Prevention System provides backflow protection for bulk chemical and High Purity Water services in laboratories, industrial plants and wafer fabrication facilities.

Features

All high purity PTFE and PFA construction of the wetted components.
Non-wetted surfaces of PFA and PVDF
Integrated design for compact, space savings installation.
Designed for minimal head loss
Field configurable flare connections [Inlets can be configured as either ¼” or 3/8” flare nipples] allowing for simplified retrofit installation and reduced inventories
Valve components tested to over 10,000,000 cycles in DIW (over 1,050,000 in Cabot SS-12).
Valve C_v = 0.8
Built-in leak detection & monitoring
Built-in optical valve position sensing

This product is protected by U.S. and International patents. See Malema's list of patents for more information.

Media pressure: 0 to 80 PSIG 0 to 5.5 Bar
Pneumatic actuation pressure: 60 to 120 PSIG 4.1 to 8.3 Bar
Media Temperature: 0°F to 266°F (excluding phase changes)

-17.7° C to 130° C

Ambient Temperature: 0°F to 150°F (no freezing liquids)

-17.7° C to 65.5° C

Materials:

o Wetted Surfaces: PFA & PTFE(modified)

o Non-Wetted Surfaces PFA, PVDF

Other Materials: Viton Seals, Halar Coated Stainless, Stainless Steel, Polypro, Nylon, Acetyl,
Mounting: Mount the MIID horizontally with the Drain Outlet facing UP.
Mounting: Two(2) 10-32 screws required but, not provided
Pneumatic control interface: 10-32 UNF-2B (M5)
Electrical interface: 24 VDC, 0.1 A max
Critical Valve characteristic: C_v = 0.8
Inlets: Field Configurable as ¼” or 3/8” Flare nipple
Outlets:

o POU Outlet: ¼” Flare nipple

o Vent-Drain Outlet: 3/8” Flare nipple

Overall Dimensions (each MIID block):

o Height 5.50” 139.70 mm

o Width 3.75” 95.25 mm

o Length 6.50” 165.10 mm

Overall Dimension (Three(3) MIID Kit):

o Height 5.50” 139.70 mm

o Width 11.25” 285.75 mm

o Length 6.50” 165.10 mm

Overall Dimensions (PLC Module):

o Height 2.75” 70.00 mm

o Width 3.68” 93.00 mm

o Length 6.31” 160.00 mm