Blog posts tagged with 'cmp'

Malema Sensors® LFC-7000 series slurry flow controllers improve flow control performance and time to achieve flow control, saving our customers 20% to 30% of CMP slurry compared to peristaltic pump slurry delivery.

CMP Slurry and DI Water cross contamination events were disrupting operations and depressing yields at a major, multi-national semiconductor manufacturer. On a reoccurring but sporadic basis, the customer discovered CMP slurry contaminating its DI water systems or their CMP slurries supplies were in...