Blog posts tagged with 'slurry'

Malema Sensors® LFC-7000 series slurry flow controllers improve flow control performance and time to achieve flow control, saving our customers 20% to 30% of CMP slurry compared to peristaltic pump slurry delivery.

Accurate flow measurement and control of slurry dispense in semiconductor polishing and lapping tools is critical. It guarantees customers high throughput, reduced consumption, and consistent quality. Malema’s PFA Coriolis Mass Flow Meter and Flow Controller is the only flow measuring technology that is successfully used in high viscosity applications, such as diamond slurries.