Industrial

The CMFC-5000 Integrated and Compact Coriolis Flow Controller controls liquid and Slurry flows up to 5000 grams per minute to within 1.5% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.

The LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries.

The LFC-7650 Series high-performance closed-loop flow controllers for CMP polishing slurries are designed as a drop-in upgrade to improve performance of existing semiconductor manufacturing polishing tools.

The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.

The CPFM-8800 Series is a family of advanced Coriolis flow meters fabricated exclusively from PFA polymeric material for measuring liquids in high-purity semiconductor, biopharm and other applications that require all-PFA wetted surfaces and provide a Mass Flow Rate, Total Mass and Temperature output with accuracy ±1% of reading.

The VF-8100 Series Vortex Flow Meter consists of an inline flow sensor and electronics all in one package. The flow sensor is a straight-through PFA tube that uses ultrasonic sensing technology to measure the flow rate. There are no moving parts or mechanical seals on the VF-8100 Vortex Flow Meters, resulting in superior reliability and durability. The VF-8100 Vortex Flow Meter comes in four sizes (3/8", 1/2", 3/4" and 1") and is an ideal choice for use in the semiconductor industry where minimal footprint, high purity and corrosion resistant wetted parts are required.

The M-60 Series low flow, flow switches monitor increasing and decreasing flow. They utilize a single moving part which responds to fluid (liquid or gas) flowing within a system. These switches are suitable for a wide range of applications in industrial, biomedical, and OEM products. The flow monitors operate only when fluid is positively established.

The operating principle is based on a magnetic piston which responds only to the motion of fluids within the line, not to static or system pressures. In the presence of fluid flow, controlled movement of the piston actuates an external hermetically sealed reed switch. This switch can be used to actuate audible or visual alarms, as well as relays, or other controls.