Semiconductor

“Flow Through” Pressure Transducer w/ Onboard Display The KL95 is a “flow through” pressure transducer suitable for use in monitoring pressure of various high-purity and corrosive/aggressive fluids. The “flow through” design provides for minimal “dead volume” which reduces the potential for contamination of the measured fluid/process. The KL95 is provided with an integrally mounted local LED display and is available in two standard pressure ranges.

Adjustable flow switch with right-angle flow, available in 1/8" & 1/4" port sizes.

Pressure Transducer for Ultra-Pure Water The KL-91 is a pressure transducer suitable for use in monitoring pressure of various high-purity fluids. The superior design provides for minimal “dead volume” which reduces the potential for contamination of the measured fluid. The KL-91 is available in two construction type: inline or insertion. The body construction meets IP-65 requirements and EMC resistant the level of CE.

The Malema MDM-3000 Dispense Verification Meter is the first high-purity instrument to provide realtime, direct volume measurement of critical process fluids with greater speed and accuracy than possible from traditional flow meter totalizers, weight scales or graduated cylinders.

The M-VF-F Series Pressure Relief Valve is designed with an all-PFA molded body suitable for semiconductor, ultra-pure water and aggressive chemical applications.

Created exclusively for use in Chemical Mechanical Planarization (CMP) tools, the patented Malema Interconnect Interlock Device (MIID-1000) By-Pass Leak Detection and Prevention System, has been designed specifically to protect against liquid back-flow and internal bypass leaks. This capability is created via a manifold of pneumatically actuated valves that operate in a coordinated fashion in order to ensure that CMP-liquid supplies cannot be contaminated before use or during the actual CMP process. MIID-1000 has retrofit kits that can be installed into existing CMP tools.

The operating principle is based on a free floating magnetic piston which responds only to the motion of fluids within the line, not to static or system pressures. In the presence of fluid flow, controlled movement of the piston actuates an external hermetically sealed reed switch. This switch can be used to actuate audible or visual alarms, as well as relays, or other controls.

The operating principle is based on a free floating magnetic piston which responds only to the motion of fluids within the line, not to static or system pressures. In the presence of fluid flow, controlled movement of the piston actuates an external hermetically sealed reed switch. This switch can be used to actuate audible or visual alarms, as well as relays, or other controls. The piston's movement can be seen through the PFA body.